Preparation and properties of amorphous silicon produced by a consecutive, separated reaction chamber method
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Advanced Surface Polishing Techniques
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References (3)
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1. Spear · Solid State Commun. · 1975 · 17 · 119310.1016/0038-1098(75)90284-7 ↗
2. Kuwano · 1981 · 698
3. Tsuda · Jpn. J. Appl. Phys. · 1982 · 21 · 25110.7567/JJAPS.21S2.251 ↗