Hydrogenated amorphous and polycrystalline silicon TFTs by hot-wire CVD
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (9)
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9. H.C. Slade, M.S. Shur, S.C. Deane, M. Hack, in: M. Hack, E.A. Schiff, S. Wagner, R. Schropp, A. Matsuda (Eds.), Amorphous Silicon Technology—1996, Vol. 420, Materials Research Society, Pittsburgh, 1996, p. 257.10.1557/PROC-420-257 ↗