Neutral radical detection in silane glow-discharge plasma using coherent anti-stokes raman spectroscopy
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OpenAlex topics: Ion-surface interactions and analysis · Thin-Film Transistor Technologies · Mass Spectrometry Techniques and Applications
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References (8)
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4. Hata · Jpn. J. Appl. Phys. · 1983 · 22 · L110.1143/JJAP.22.L1 ↗
5. Silane RF Glow-Discharge Plasma Diagnosis by CARS
6. Milligan · J. Chem. Phys. · 1970 · 52 · 259410.1063/1.1673347 ↗
7. Herzberg · 1945
8. A. Matsuda, T. Kaga, H. Tanaka and K. Tanaka, Life Time of Dominant Radicals for the Deposition of a-Si:H from SiH4 and Si2H6 Glow Discharges, this volume.