journal article·1995-07

Properties and applications of electron cyclotron plasma deposited SiOxNy films with graded refractive index profiles

Pavel V. Bulkin, Pieter L. Swart, Beatrys M. Lacquet

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Optical Coatings and Gratings · Metal and Thin Film Mechanics · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (12)

Show source-provided references
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8. Bulkin · Thin Solid Films · 1994 · 241 · 24710.1016/0040-6090(94)90434-0 ↗
9. Bulkin · Opt. Eng. · 1994 · 33 · 289410.1117/12.175695 ↗
10. Swanepoel · J. Phys. · 1983 · E16 · 1214
11. Southwell · Appl. Opt. · 1989 · 28 · 294910.1364/AO.28.002949 ↗
12. Discrete-Time Signal Processing