Growth processes of RF glow discharge deposited a-Si:H and a-Ge:H films
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (6)
Show source-provided references
1. Knights · 1984 · 5
2. Drevillon · Thin Solid Films · 1985
3. Drevillon · Appl. Phys. Lett. · 1983 · 42 · 80110.1063/1.94100 ↗
4. Drevillon · Thin Solid Films · 1985 · 124 · 21710.1016/0040-6090(85)90268-8 ↗
5. i Cabarrocas · 1985 · 136
6. Drevillon · Rev. Sci. Instr. · 1982 · 53 · 96910.1063/1.1137118 ↗