Deposition of nanocrystalline silicon films (nc-Si:H) from a pure ECWR-SiH4 plasma
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (7)
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3. Tsai · 1988 · 123
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5. Oechsner · 1984 · Vol. 37
6. Kaneko · Jpn. J. Appl. Phys. · 1993 · 32 · 490710.1143/JJAP.32.4907 ↗
7. Satoh · Jpn. J. Appl. Phys. · 1985 · 24 · L49110.1143/JJAP.24.L491 ↗