Valency control of P-type a-SiC:H having the optical band gap more than 2.5 eV by electron-cyclotron resonance CVD (ECR CVD)
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Silicon Carbide Semiconductor Technologies · Thin-Film Transistor Technologies · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. Hattori · 1987
2. Nonomura · Appl. Phys. A · 1983 · 32 · 3110.1007/BF00626131 ↗
3. D. Kruangam, T. Toyama, Y. Hattori, M. Deguchi, H. Okamoto and Y. Hamakawa: this volume.