Temperature and growth-rate effects on the hydrogen incorporation in a-Si:H
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (13)
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1. Amorphous silicon technology10.1557/PROC-467-621 ↗
2. Ganguly · Mater. Res. Soc. Symp. Proc. · 1992 · 258 · 3910.1557/PROC-258-39 ↗
3. Gallagher · Mater. Res. Soc. Symp. Proc. · 1986 · 70 · 310.1557/PROC-70-3 ↗
4. Perrin · Surf. Sci. · 1989 · 210 · 11410.1016/0039-6028(89)90106-4 ↗
5. W.M.M. Kessels, L. Gabella, J. Bastiaansen, R.J. Severens, M.C.M. van de Sanden, D.C. Schram, in: Papers presented at the 2nd conference on Low Temperature Plasma Diagnostics, Bad-Honnef, 1997.
6. van Ijzendoorn · Anal. Chim. Acta · 1994 · 297 · 5510.1016/0003-2670(94)00055-7 ↗
7. R.J. Severens, W.M.M. Kessels, L. Gabella, F. van de Pas, M.C.M. van de Sanden, D.C. Schram, in: Proc. of 13th Int. Symp. Plasma. Chem., Beijing (1997) 1059.
8. Langford · Phys. Rev. B · 1992 · 45 · 1336710.1103/PhysRevB.45.13367 ↗
9. W.M.M. Kessels, R.J. Severens, M.C.M. van de Sanden, L. van Ijzendoorn, D.C. Schram, Amorphous silicon technology, Mater. Res. Soc. Symp. Proc., 1998, submitted for publication.
10. Lin · J. Appl. Phys. · 1988 · 64 · 18810.1063/1.341461 ↗
11. Severens · Mater. Res. Soc. Symp. Proc. · 1996 · 420 · 34110.1557/PROC-420-341 ↗
12. Kampas · Appl. Phys. Lett. · 1981 · 39 · 40710.1063/1.92754 ↗
13. G.M. Barrow, Physical Chemistry, McGraw-Hill Kogakusha, Tokyo, 1979, p. 693.