Photoenhanced dissolution and diffusion of Ag in As2Sx layers
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Abstract
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Research context
OpenAlex topics: Chalcogenide Semiconductor Thin Films · Phase-change materials and chalcogenides · Semiconductor materials and interfaces
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References (4)
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1. Tai · 1982 · Vol. 82–89 · 9
2. The mechanism of photoenhanced silver dissolution in amorphous As-S layers
3. Borisova · 1981
4. Firth · SPIE Vol. 539 Advances in Resist Technology and Processing · 1985 · II · 16010.1117/12.947829 ↗