journal article·2025-05

Enhanced nanomechanical properties of fused silica surface by wet etching and its implication on laser induced damage

Qiuju Zheng, Youze Ma, Shuang Ni, Laixi Sun, Jun Zhang, Yucai Su, Kangfeng Yi, Jiaxin Yu, Xiaobo Liao, Hui Ye, Hongtu He

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Laser Material Processing Techniques · Advanced Surface Polishing Techniques · Diamond and Carbon-based Materials Research

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (48)

Show source-provided references
1. Compact optomechanical accelerometers for use in gravitational wave detectors10.1063/5.0142108 ↗
2. Magnetorheological elastic super-smooth finishing for high-efficiency manufacturing of ultraviolet laser resistant optics10.1117/1.OE.52.7.075104 ↗
3. Improvement of high-power laser performance for super-smooth optical surfaces using electrorheological finishing technology10.1364/AO.56.009822 ↗
4. Roughness measurement and ion-beam polishing of super-smooth optical surfaces of fused quartz and optical ceramics10.1364/OE.22.020094 ↗
5. Fused silica contamination layer removal using magnetic field-assisted finishing10.1111/jace.17000 ↗
6. Effect of polishing-induced subsurface impurity defects on laser damage resistance of fused silica optics and their removal with HF acid etching10.3390/app7080838 ↗
7. HF-based etching processes for improving laser damage resistance of fused silica optical surfaces10.1111/j.1551-2916.2010.04112.x ↗
8. Ion beam assisted smoothing of optical surfaces10.1007/s00339-003-2274-6 ↗
9. KOH-based shallow etching for exposing subsurface damage and increasing laser damage resistance of fused silica optical surface10.1016/j.optmat.2020.110249 ↗
10. Ultraviolet laser damage dependence on contamination concentration in fused silica optics during reactive ion etching process10.3390/ma11040577 ↗
11. Effect of HF etching on the surface quality and laser-induced damage of fused silica10.1016/j.optlastec.2011.10.013 ↗
12. Layer by layer exposure of subsurface defects and laser-induced damage mechanism of fused silica10.1016/j.apsusc.2019.145186 ↗
13. Experimental study on surface integrity and subsurface damage of fused silica in ultra-precision grinding10.1007/s00170-021-07439-y ↗
14. Chemistry and formation of the Beilby layer during polishing of fused silica glass10.1111/jace.13659 ↗
15. Ellipsometric study of polished glass surfaces10.1016/0039-6028(69)90023-5 ↗
16. Ultra-smooth surface with 0.4 Å roughness on fused silica10.1016/j.ceramint.2022.08.022 ↗
17. Characteristics of hydrolyzed layer and contamination on fused silica induced during polishing10.1016/j.ceramint.2013.08.121 ↗
18. Surface hydration and nanoindentation of silicate glasses10.1016/j.jnoncrysol.2009.10.005 ↗
19. Evolution of physical and mechanical properties of fused silica after subsurface damage layer removal by RIE treatment10.1016/j.jnoncrysol.2023.122475 ↗
20. Effect of H2O2 treatment on mechanical and mechanochemical properties of fused silica10.3390/app13137636 ↗
21. Laser-induced damage characteristics in fused silica surface due to mechanical and chemical defects during manufacturing processes10.1016/j.optlastec.2016.12.022 ↗
22. Dependence of water adsorption on the surface structure of silicon wafers aged under different environmental conditions10.1039/C9CP04776J ↗
23. Measurement of hardness and elastic modulus by instrumented indentation: advances in understanding and refinements to methodology10.1557/jmr.2004.19.1.3 ↗
24. Differences in indentation and wear behaviors between the two sides of thermally tempered soda lime silica glass10.1111/jace.17872 ↗
25. Nanoindentation: measuring methods and applications10.1016/j.cirp.2010.05.009 ↗
26. Investigation of the effect of Berkovich and Cube Corner indentations on the mechanical behavior of fused silica using molecular dynamics and finite element simulation10.1016/j.ceramint.2021.12.201 ↗
27. Multiscale electronic and thermomechanical dynamics in ultrafast nanoscale laser structuring of bulk fused silica10.1038/s41598-020-71819-9 ↗
28. Indentation deformation in oxide glasses: quantification, structural changes, and relation to cracking
29. A Raman spectroscopic study of shock-wave densification of vitreous silica10.1007/s002690050190 ↗
30. Si-O bond-length modification in pressure-densified amorphous SiO210.1103/PhysRevB.35.9376 ↗
31. Densification effects on porous silica: a molecular dynamics study10.1016/j.scriptamat.2018.02.007 ↗
32. Bond length-bond angle correlation in densified silica-results from 17O NMR spectroscopy10.1063/1.4983041 ↗
33. Effect of surface hydroxylation on ultra-precision machining of quartz glass10.1016/j.apsusc.2019.144170 ↗
34. Poisson's ratio and the densification of glass under high pressure10.1103/PhysRevLett.100.225501 ↗
35. Indentation of glasses10.1016/j.pmatsci.2021.100834 ↗
36. Effect of scratch direction on densification and crack initiation of optical glass BK710.1016/j.ceramint.2020.03.251 ↗
37. Role of each step in the combined treatment of reactive ion etching and dynamic chemical etching for improving the laser-induced damage resistance of fused silica10.1364/OE.415438 ↗
38. Friction-induced subsurface densification of glass at contact stress far below indentation damage threshold10.1016/j.actamat.2020.03.005 ↗
39. Subsurface structural change of silica upon nanoscale physical contact: chemical plasticity beyond topographic elasticity10.1016/j.actamat.2021.116694 ↗
40. Investigation of laser-induced damage threshold improvement mechanism during ion beam sputtering of fused silica10.1364/OE.25.029260 ↗
41. The infrared spectra and laser damage threshold of the fused silica after megacoustic field assisted hydrofluoric-based etching
42. The mechanical properties of the scratched surface for silica glass by molecular dynamics simulation10.1016/j.jnoncrysol.2015.04.001 ↗
43. Effects of ion beam etching on the nanoscale damage precursor evolution of fused silica10.3390/ma13061294 ↗
44. Anomalous thermomechanical properties and laser-induced densification of vitreous silica10.1063/1.2357016 ↗
45. Thermal conductivity of vitreous silica from molecular dynamics simulations: the effects of force field, heat flux and system size10.1063/1.4975162 ↗
46. Capping a glass thin layer on the etched surface via plasma chemical vapor deposition for improving the laser damage performance of fused silica10.1364/OE.27.002268 ↗
47. Effect of HF etching on the surface quality and laser-induced damage of fused silica10.1016/j.optlastec.2011.10.013 ↗
48. Laser induced damage characteristics of fused silica optics treated by wet chemical processes10.1016/j.apsusc.2015.09.065 ↗