journal article·1999-07

Magnetic multipole confinement used in amorphous hydrogenated carbon films deposition

N Tomozeiu, W.I Milne

Journal of Non-Crystalline Solids· Volume 249· Issue 2-3
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (21)

Show source-provided references
1. Angus · Science · 1988 · 241 · 87710.1126/science.241.4868.913 ↗
2. Amaratunga · J. Appl. Phys. · 1991 · 70 · 537410.1063/1.350219 ↗
3. Robertson · Adv. Phys. · 1986 · 35 · 31710.1080/00018738600101911 ↗
4. Dischler · Appl. Phys. Lett. · 1983 · 42 · 63610.1063/1.94056 ↗
5. Rusli · Thin Solid Films · 1995 · 270 · 16010.1016/0040-6090(95)06911-9 ↗
6. Schutte · Diamond Relat. Mater. · 1993 · 2 · 136010.1016/0925-9635(93)90185-5 ↗
7. Amaratunga · Appl. Phys. Lett. · 1996 · 68 · 252910.1063/1.116173 ↗
8. Silva · Diamond Relat. Mater. · 1995 · 4 · 98810.1016/0925-9635(94)00266-5 ↗
9. M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, Wiley, New York, 1994, p. 146
10. Catherine · Thin Solid Films · 1986 · 144 · 26510.1016/0040-6090(86)90419-0 ↗
11. Berger · Philos. Mag. Lett. · 1988 · 57 · 28510.1080/09500838808214715 ↗
12. B. Dischler, E-MRS Meeting, Les Editions de Physique Paris, vol. XVII (1987) 189
13. N.F. Mott, E.A. Davis, Electronic Processes in Non-Crystalline Materials, Clarendon, Oxford, 1979
14. Lin · Appl. Phys. Lett. · 1984 · 44 · 18510.1063/1.94702 ↗
15. Veerasamy · IEEE Trans. Plasma Science · 1993 · 21 · 32210.1109/27.277558 ↗
16. M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, Wiley, New York, 1994, p. 100
17. Huypers · J. Appl. Phys. · 1990 · 67 · 122910.1063/1.345721 ↗
18. Weiler · Phys. Rev. B · 1996 · 53 · 159410.1103/PhysRevB.53.1594 ↗
19. Silva · Philos. Mag. B · 1996 · 74 · 36910.1080/01418639608240341 ↗
20. Philips · Rev. Mod. Phys. · 1970 · 42 · 10710.1103/RevModPhys.42.317 ↗
21. G.D. Cody, Semiconductors and Semimetals, vol. 21, part B, Academic Press, New York, 1984, p. 1110.1016/S0080-8784(08)62910-5 ↗