Preparation and characterization of ZrO2–SiO2 binary films for planar optical waveguides

Abstract ZrO 2 –SiO 2 binary films for active optical waveguides were prepared by the sol–gel method with zirconium oxychloride and tetraethoxysilane as precursors. The main factors that influence the film thickness and refractive index have been found. The relationship between the film refractive index composition and heat treatment temperature has been determined. The continuous tuning of the thickness and refractive index of the thin films has also been achieved, which will open up new possibilities in the development of active optical waveguides.