Laser induced nano-hole for high throughput fabrication of silver doped chalcogenide metasurfaces

We report the potential method for high throughput chalcogenide metasurface fabrication by using focused 632.8 nm laser induced nano-hole effect in the silver doped Ge ₂₈Sb ₁₂Se ₆₀ film. Generally, laser induced dewetting effect is hard to realize in thin Ge ₂₈Sb ₁₂Se ₆₀ films, however with the assistance of silver doping, the randomly distributed nano holes can be acquired in the dewetted region. The higher the silver concentration, the easier the laser induced nano-hole effect is, but much higher silver concentration like 47.8% will suppress the laser induced nano-hole effect due to the photocrystallisation. The nano holes can be enlarged and further connect with adjacent ones by increasing the output laser power, thus the morphology of the laser induced nano holes can be flexibly manipulated. Our findings are beneficial in high-throughput fabrication of chalcogenide metamaterial.