Low-temperature metal-induced crystallization of Mn-containing amorphous Ge thin films

AbstractThis work focuses on the crystallization of amorphous germanium (a-Ge) thin films induced by manganese species. A series of Mn-containing a-Ge films ([Mn] ~0−3.7at.% range) was deposited at 150°C by the cosputtering technique. After deposition, all films were submitted to isochronal thermal annealing treatments up to 600°C and analyzed by Raman scattering, optical transmission spectroscopy and electrical resistivity measurements. The experimental results indicate that: (a) Mn impurity lowers the crystallization temperature of a-Ge in ~100°C, as confirmed by the Raman analyses, (b) the optical properties of the films are affected by both the insertion of Mn and the temperature of thermal treatment, with the optical bandgap staying in the range of ~0.7−1eV, and (c) the electrical resistivity of the samples is also influenced by the Mn concentration and by the temperature of annealing, varying between ~1.0×101 and 1.6×104Ω cm. These experimental observations were systematically studied and the possible reasons associated to them are presented and discussed.