Preparation of a-SixC1−x:H films by a separately-excited-plasma CVD method
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OpenAlex topics: Thin-Film Transistor Technologies · Diamond and Carbon-based Materials Research · Semiconductor materials and devices
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References (4)
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3. Tawada · J. Appl. Phys. · 1982 · 53 · 527310.1063/1.331363 ↗
4. Dichler · Solid State Commun. · 1983 · 48 · 10510.1016/0038-1098(83)90936-5 ↗