The influence of the thermal annealing treatments on the microstructure and optical properties of a-C:H films prepared by PECVD method
Source abstract
Abstract
Abstract In this work, hydrogenated amorphous carbon (a-C:H) films were prepared by using a radio frequency (13.56 MHz) plasma enhanced chemical vapor deposition (PECVD) method at 220 °C. The influence of the annealing treatments on the microstructure and optical properties of the a-C:H films has been investigated. Raman and X-ray photo electron spectroscopy (XPS) results showed that the sp2 carbon fraction and sp2/sp3 ratio increase and sp3 carbon fraction decrease with increasing the annealing temperature. However, with increasing annealing temperature, the D and G peak positions and the G peak FWHM have no obvious changes. The spectroscopic ellipsometry suggested that the density, refractive index n and the extinction coefficient k of the as-deposited film and the films annealed at 300 and 400 °C are not affected obviously by thermal annealing treatments. However, when the annealing temperature is higher than 400 °C, the films become high-density and opaque, meanwhile, the film thickness decrease significantly. The UV-VIS spectroscopy measurement indicated that the increase of sp2 fraction and graphitization features of the a-C: H films result in the decrease of the films transmission and optical band gap.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Carbon Nanotubes in Composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (39)
Show source-provided references
1. Effect of unbonded hydrogen on amorphous carbon film deposited by PECVD with annealing treatment10.1016/j.diamond.2017.12.002 ↗
2. Stability of hydrogenated amorphous carbon thin films for application in electronic devices10.1016/j.diamond.2018.10.016 ↗
3. Optical characterization of hydrogenated amorphous carbon (a-C:H) thin films deposited from methane plasma10.1016/S0040-6090(99)00942-6 ↗
4. The correlation between optical and mechanical properties of amorphous diamond-like carbon films prepared by pulsed filtered cathodic vacuum arc deposition10.1016/j.tsf.2018.03.053 ↗
5. Field emission from tetrahedral amorphous carbon10.1016/S0925-9635(97)00296-3 ↗
6. Electron field-emission from diamond-like carbon films grown by a saddle field fast atom beam source10.1116/1.1598977 ↗
7. Characterization of temperature-induced changes in amorphous hydrogenated carbon thin films10.1016/j.diamond.2013.05.004 ↗
8. Complete characterization by Raman spectroscopy of the structural properties of thin hydrogenated diamond-like carbon films exposed to rapid thermal annealing
9. In-situ thermal stability analysis of amorphous carbon films with different sp3 content10.1016/j.carbon.2018.01.034 ↗
10. The effect of annealing on the properties of diamond-like carbon protective antireflection coatings10.1016/j.renene.2007.05.022 ↗
11. Experimental analysis of the thermal annealing of hard a-C:H films10.1016/j.diamond.2014.03.005 ↗
12. Structural changes of diamond-like carbon films due to atomic hydrogen exposure during annealing10.1016/j.apsusc.2006.09.017 ↗
13. Annealing effect on the structure, mechanical and tribological properties of hydrogenated diamond-like carbon films10.1016/j.tsf.2006.04.018 ↗
14. Annealing behavior of amorphous C:H films prepared by glow discharge decomposition of CH4 and H210.1143/JJAP.25.1851 ↗
15. Novel low k dielectrics based on diamondlike carbon materials10.1149/1.1838531 ↗
16. Structural and optical properties of As–Se–Te chalcogenide films prepared by plasma-enhanced chemical vapor deposition10.1088/2053-1591/ab014d ↗
17. L. Mochalov, A. Nezhdanov, M. Kudryashov, A. Logunov, M. Gushchin, G. Chidichimo, G. D. Filpo, A. Mashin, Influence of plasma-enhanced chemical vapor deposition parameters on characteristics of As–Te Chalcogenide films, Plasma Chem. Plasma Process., DOI https://doi.org/10.1007/s11090-017-9830-x.10.1007/s11090-017-9830-x ↗
18. Enhancement of IR transparency of arsenic sulfide materials via plasmachemical conversion of the initial arsenic monosulfide in low-temperature RF plasma10.1088/1361-6463/aae577 ↗
19. Influence of PECVD parameters on the properties of diamond-like carbon films10.1016/j.tsf.2011.01.197 ↗
20. Synthesis and structural evolution of hydrogenated amorphous silicon carbide thin film with carbon nanostructures10.1016/j.jnoncrysol.2018.10.004 ↗
21. Raman spectroscopy of hydrogenated amorphous carbons10.1103/PhysRevB.72.085401 ↗
22. The influence of methane flow rate on microstructure and surface morphology of a-SiC: H thin films prepared by plasma enhanced chemical vapor deposition technique10.1016/j.tsf.2016.12.027 ↗
23. Surface morphology and grain analysis of successively industrially grown amorphous hydrogenated carbon films (a-C: H) on silicon10.1016/j.apsusc.2015.04.113 ↗
24. In situ-grown silicon quantum dots in SiCx:H/a-C:H hetero-multilayer films prepared by plasma enhanced chemical vapor deposition method10.1016/j.jallcom.2017.05.141 ↗
25. Temperature effect on hydrogenated amorphous carbon leading to hydrogenated graphene by pulsed laser deposition10.1016/j.apsusc.2017.07.125 ↗
26. Raman spectroscopy on amorphous carbon films10.1063/1.362745 ↗
27. Fullerene nanostructure-induced excellent mechanical properties in hydrogenated amorphous carbon10.1063/1.2794017 ↗
28. Observation of structure transition as a function of temperature in depositing hydrogenated sp2-rich carbon films10.1016/j.apsusc.2018.01.250 ↗
29. Raman scattering characterization of carbon bonding in diamond and diamondlike thin films10.1116/1.575297 ↗
30. Transpolyacetylene chains in hydrogenated amorphous carbon films free of nanocrystalline diamond10.1063/1.1538349 ↗
31. Origin of the 1150-cm−1 Raman mode in nanorystalline diamind
32. Interpretation of Raman spectra of disordered and amorphous carbon10.1103/PhysRevB.61.14095 ↗
33. Structural and mechanical properties of a-C:H thin films grown by RF-PECVD10.1016/j.diamond.2004.01.017 ↗
34. Is stress necessary to stabilise sp3 bonding in diamond-like carbon?10.1016/S0925-9635(01)00705-1 ↗
35. Hydrogen effects on the post-production modification of diamond-like carbon produced by pulsed laser deposition10.1016/S0925-9635(00)00508-2 ↗
36. Optical and structural characterization of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films deposited via coaxial arc plasma10.1016/j.cap.2018.11.012 ↗
37. Optical constants of a hydrogenated amorphous carbon film10.1063/1.333135 ↗
38. The evolution of PL properties of hydrogenated Si-rich silicon carbide/amorphous carbon nano-multilayer films grown by PECVD10.1016/j.ijleo.2018.09.091 ↗
39. Effects of nitrogen doping on the electrical conductivity and optical absorption of ultrananocrystalline diamond/hydrogenated amorphous carbon films prepared by coaxial arc plasma deposition10.7567/JJAP.55.07LE01 ↗