Metallic phase formation in oxide films

Abstract Metallic particles embedded in the oxide film play an important role in film’s optical property. In this paper it is demonstrated that metallic phases of Ag, Ti, and Pb, can be formed in different oxide films under heating, X-ray photon, and electron radiation. The metallic phase separated from metal oxide film was investigated by X-ray photoelectron spectroscopy technique. Metal oxygen bond breaking and total energy reduction in the film result in the formation of metal in the film. It is necessary to fully understand the formation mechanism of metallic particles so their shapes and distributions can be tailored to achieve the desired film’s properties.