Deposition of iron nanoparticles onto multiwalled carbon nanotubes by helicon plasma-enhanced, chemical vapor deposition

Abstract We report helicon plasma-enhanced, chemical vapor deposition (helicon-PECVD) of iron (Fe) nanoparticles onto multiwalled carbon nanotubes (MWCNTs) with ferrocene as an iron source. Ferrocene was evaporated from the bubbler by heating, and the helicon plasma treatment was performed with the evaporated ferrocene and hydrogen gas at (−)DC bias voltage. The resulting MWCNT/Fe nanoparticle hybrids were characterized by X-ray fluorescence spectroscopy, X-ray diffraction spectroscopy, field-emission scanning electron microscopy, transmission electron microscopy, micro-Raman spectroscopy, and superconducting quantum interference device magnetometry.