In situ fabrication of waveguide-compatible glass-embedded silver nanoparticle patterns by masked ion-exchange process

Abstract We report a study on the properties of silver nanoparticles formed in glass using a masked silver–sodium ion-exchange technique, a process that has been used to fabricate patterned optical waveguides. Characterizations reveal that spherical nanoparticles with a diameter of 5–10 nm are concentrated below the mask edge at a depth of 50–100 nm from the surface. The amount of nanoparticles and the wavelength of the associated localized surface plasmon resonance can be controlled by the spacing between adjacent mask openings. After gentle etching, the surface morphology of the sample shows well-defined nanoparticle patterns. These closely packed nanoparticles embedded in the glass surface have a potential to be used for high-sensitivity surface enhanced spectroscopy, in a glass waveguide device.