Optimisation of the hydrogen content in a-Si:H deposited at high rate by dc magnetron sputtering

journal article·1993-12

N. Beldi, J. Sib, L. Chahed, T. Smaïl, T. Mohammed-Brahim, Z. Djebbour, J.P. Kleider, C. Longeaud, D. Mencaraglia

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence

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