Texture and surface analysis of thin-film GaAs on glass formed by pulsed-laser deposition

Abstract Thin-film GaAs on glass was formed by ablating n-type GaAs with nano-second pulses at 532 nm. The deposition was done in the most straightforward way without heating the substrate. The texture of films has been investigated with X-ray measurements, spatially resolved micro-Raman spectroscopy, and atomic force microscopy. The results reveal that the film texture is of multi-phase nature consisting of randomly oriented GaAs microcrystallites, amorphous parts, and (1 1 1) zincblende migrations in the nano-regime.