High power generators for medium frequency sputtering applications
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Abstract
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Research context
OpenAlex topics: High voltage insulation and dielectric phenomena · Power Transformer Diagnostics and Insulation · Acoustic Wave Resonator Technologies
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References (7)
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1. Pulsed technology: A new era of magnetron sputtering
2. Dual magnetron sputtering system (DMS) with sine-wave power supply for large-area coating
3. High-power pulsed magnetron sputter technology
4. Schiller · Surf. Coat. Technol. · 1993 · 61 · 33110.1016/0257-8972(93)90248-M ↗
5. Leybold · 1996
6. Hüttinger Elektronik · 1996
7. Von Ardenne Anlagentechnik · 1996