The use of ac power on cylindrical magnetrons
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Acoustic Wave Resonator Technologies · Particle accelerators and beam dynamics
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References (22)
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2. Kumagi · IEEE Trans. Parts, Hybrids Packaging · 1972 · 8 · 710.1109/TPHP.1972.1136571 ↗
3. Hanfmann · J. Vac. Sci. Tech. · 1973 · 10 · 11110.1116/1.1317917 ↗
4. H. Kumagi, private communication.
5. Chapin · 1979
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7. McKelvey · 1982
8. Robinson · 1983
9. McKelvey · 1984
10. McKelvey · 1984
11. McKelvey · 1984
12. Sieck · 1994 · 37 · 233
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14. Este · J. Vac. Sci. Tech. · 1988 · A6 · 184510.1116/1.575266 ↗
15. W.-D. Munz et al., DE-Pat 38 02 852 C2 (Feb. 1988).
16. Szczyrbowski · 1992
17. Latz · 1992
18. Planar magnetron sputtering
19. Patent applied for.
20. Reactive sputtering of SiO2 layers onto large-scale substrate using an ac twin magnetron cathode
21. J.P. Lehan, C.K. Carniglia, these Proceedings, p. 62.
22. These Proceedings.