journal article·1995-07

Selective thermal — as opposed to non-selective plasma — nitridation of SiGe related materials examined by in situ photoemission techniques

D. Aubel, M. Diani, L. Kubler, J.L. Bischoff, D. Bolmont

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OpenAlex topics: Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence · Thin-Film Transistor Technologies

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References (17)

Show source-provided references
1. Ranke · Vacuum · 1990 · 41 · 65610.1016/S0042-207X(05)80153-8 ↗
2. Entringer · Surf. Sci. · 1990 · 234 · 22110.1016/0039-6028(90)90555-M ↗
3. Chen · Surf. Sci. · 1992 · 262 · 29410.1016/0039-6028(92)90127-R ↗
4. Chen · Surf. Sci. · 1992 · 264 · 29210.1016/0039-6028(92)90186-A ↗
5. Ranke · J. Electron Spectroscopy Related Phenomena · 1993 · 61 · 23110.1016/0368-2048(93)80053-O ↗
6. Vancauwenberghe · Appl. Phys. Lett. · 1991 · 59 · 203110.1063/1.106122 ↗
7. Hellmann · J. Vac. Sci. Technol. · 1992 · A10 · 163110.1116/1.577761 ↗
8. Bolmont · Surf. Sci. · 1992 · 269&270 · 92410.1016/0039-6028(92)91371-H ↗
9. Cohen · J. Vac. Technol. · 1992 · A10 · 216610.1116/1.577999 ↗
10. Hlil · Phys. Rev. · 1987 · B35 · 591310.1103/PhysRevB.35.5913 ↗
11. Dresser · Surf. Sci. · 1989 · 218 · 7510.1016/0039-6028(89)90621-3 ↗
12. Bischoff · Surf. Sci. Lett. · 1991 · 248 · L24010.1016/0039-6028(91)90050-3 ↗
13. Kubler · Phys. Rev. · 1988 · B38 · 1311310.1103/PhysRevB.38.13113 ↗
14. Dufour · Surf. Sci. · 1994 · 304 · 3310.1016/0039-6028(94)90750-1 ↗
15. Aubel · J. Phys. III (Paris) · 1994 · 4 · 733
16. 1984
17. Prabhakaran · Appl. Phys. Lett. · 1993 · 62 · 86410.1063/1.108548 ↗