journal article·1989-12

Reduction of defects by high temperature annealing (150°C–240°C) in hydrogenated amorphous silicon films deposited at room temperature

G.N Parsons, C Wang, M.J Williams, G Lucovsky

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies

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References (8)

Show source-provided references
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2. Parsons · J. Non-Cryst. Solids · 1987 · 97&98 · 137510.1016/0022-3093(87)90329-2 ↗
3. Moustakas · Solid State Comm. · 1977 · 23 · 15510.1016/0038-1098(77)90099-0 ↗
4. Fang · J. Non-Cryst. Solids · 1981 · 35&36 · 255
5. Parsons · J. Non-Cryst. Solids · 1989 · 107 · 29510.1016/0022-3093(89)90475-4 ↗
6. Staebler · J. Appl. Phys. · 1980 · 51 · 326210.1063/1.328084 ↗
7. Jackson · Phys. Rev. B · 1988 · 37 · 102010.1103/PhysRevB.37.1020 ↗
8. Stutzman · Phys. Rev. B · 1986 · 34 · 6310.1103/PhysRevB.34.63 ↗