Amorphous hydrogenated SiC from a low power discharge of SiH4-C2H2 mixture
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Transition Metal Oxide Nanomaterials
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References (8)
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4. Kuboi · Jpn. J. Appl. Phys. · 1981 · 20 · L78310.1143/JJAP.20.L783 ↗
5. Fujimoto · 1982
6. Tsai · Solar Energy Mat. · 1979 · 1 · 2910.1016/0165-1633(79)90054-6 ↗
7. Nakazawa · Jpn. J. Appl. Phys. · 1982 · 21 · L17610.1143/JJAP.21.L176 ↗
8. Reimer · Solid State Commun. · 1981 · 37 · 16110.1016/0038-1098(81)90734-1 ↗