journal article·1993-12

Local order and H-bonding in N-rich amorphous silicon nitride

C. Sénémaud, A. Gheorghiu, L. Amoura, R. Etemadi, H. Shirai, C. Godet, M. Fang, S. Gujrathi

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Metal and Thin Film Mechanics

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References (10)

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