High quality a-SiGe alloys prepared by new methods - a-SiGe:H:F and superlattice structure fabricated by photo-CVD -
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Semiconductor materials and interfaces
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References (5)
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2. Tsuda · Jpn. J. Appl. Phys. · 1982 · 21 · 25110.7567/JJAPS.21S2.251 ↗
3. Oda · Technical Digest of the Int'1 PVSEC-1 · 1984 · 429
4. Abeles · Phys. Rev. Lett. · 1983 · 21 · 200310.1103/PhysRevLett.51.2003 ↗
5. Hirose · J. Non-Cryst. Solids · 1984 · 66 · 32710.1016/0022-3093(84)90340-5 ↗