journal article·1995-07

Measurement and analysis of hydrogen depth profiles in MOS-structures by using the 15N nuclear reaction method

J. Krauser, F. Wulf, D. Bräunig

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Semiconductor materials and devices · Electron and X-Ray Spectroscopy Techniques · Nuclear Physics and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (21)

Show source-provided references
1. McLean · IEEE Trans. Nucl. Sci. NS-27 · 1980 · 165110.1109/TNS.1980.4331084 ↗
2. Griscom · J. Appl. Phys. · 1985 · 58 · 252410.1063/1.335931 ↗
3. Lai · J. Appl. Phys. · 1983 · 54 · 254010.1063/1.332323 ↗
4. Brown · IEEE Trans. Nucl. Sci. · 1992 · 39 · 223610.1109/23.211426 ↗
5. Briere · 1990 · 293
6. Krauser · Microelectron. Eng. · 1993 · 22 · 6510.1016/0167-9317(93)90131-N ↗
7. Gale · J. Appl. Phys. · 1983 · 54 · 693810.1063/1.332009 ↗
8. Turos · Nucl. Instr. and Meth. · 1984 · B4 · 9210.1016/0168-583X(84)90047-8 ↗
9. Tirira · Nucl. Instr. and Meth. · 1990 · B45 · 14710.1016/0168-583X(90)90805-5 ↗
10. Lanford · Nucl. Instr. and Meth. · 1976 · 149 · 566
11. Marwick · J. Appl. Phys. · 1988 · 63 · 229110.1063/1.341043 ↗
12. Horn · Nucl. Instr. and Meth. · 1990 · B45 · 25610.1016/0168-583X(90)90830-N ↗
13. Krauser · HMI Report # HMI-B · 1994 · 514
14. Briere · Nucl. Instr. and Meth. · 1990 · B45 · 4510.1016/0168-583X(90)90781-O ↗
15. Rudolph · J. Rad. Nucl. Chem. · 1984 · 83 · 9910.1007/BF02209299 ↗
16. Briere · IEEE Trans. Nucl. Sci. · 1990 · 37 · 165810.1109/23.101262 ↗
17. Amsel · Nucl. Instr. and Meth. · 1983 · 218 · 18310.1016/0167-5087(83)90977-8 ↗
18. Maurel · Nucl. Instr. and Meth. · 1982 · 197 · 110.1016/0167-5087(82)90111-9 ↗
19. Zinke-Allmang · Z. Phys. · 1986 · A325 · 183
20. Briere · 1992
21. Liu · Phys. Rev. · 1991 · B44 · 186110.1103/PhysRevB.44.1861 ↗