Infrared relfectance spectroscopy of very thin films of a-SiH
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Silicon and Solar Cell Technologies
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References (8)
Show source-provided references
1. Ellipsometric Study of a-Si:H Nucleation, Growth and Interfaces
2. Antoine · J. Appl. Phys. · 1988 · 63 · 36010.1063/1.340247 ↗
3. Drevillon · J. Appl. Phys. · 1988 · 63 · 508810.1063/1.340408 ↗
4. Chabal · J. Vac. Sci. Technol. · 1989 · A7 · 210410.1116/1.575980 ↗
5. N. Maley et al., to be published.
6. Oxidation
7. Pinarbasi · Thin Solid Films · 1989 · 171 · 21710.1016/0040-6090(89)90045-X ↗
8. Cardona · Phys. Stat. Sol. · 1983 · b118 · 46310.1002/pssb.2221180202 ↗