High-efficiency amorphous silicon p-i-n solar cells deposited from disilane at rates up to 2 nm/s using VHF discharges
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (4)
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1. Curtins · Plasma Chem. and Plasma Processing · 1987 · 7 · 26710.1007/BF01016517 ↗
2. Godyak · IEEE Trans. on Plasma Sci. · 1986 · PS-14 · 11210.1109/TPS.1986.4316513 ↗
3. Gallagher · J. Appl. Phys. · 1986 · 60 · 136910.1063/1.337312 ↗
4. Ferreira · J. Phys. D: Appl. Phys. · 1984 · 17 · 177510.1088/0022-3727/17/6/014 ↗