Luminescence-based oxygen sensor structurally integrated with an organic light-emitting device excitation source and an amorphous Si-based photodetector

Abstract Structurally integrated photoluminescence-based O2 sensors are described. The structures are based on (1) integrating the excitation source, which is an array of organic light emitting device (OLED) pixels, with a thin-film sensing element, and (2) integrating the sensing element with the photodetector (PD), which is a p–i–n structure based on a-(Si,Ge):H. These components are fabricated on separate glass substrates that are attached back-to-back, resulting in devices with a thickness that is determined by the substrates. Initial design, testing, and issues in the OLED/sensing film/PD three-component structural integration are also reported.