Low pressure chemical vapour deposition of tantalum pentoxide thin layers
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OpenAlex topics: Semiconductor materials and devices · Copper Interconnects and Reliability · Metal and Thin Film Mechanics
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References (7)
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5. Roth · J. Solid State Chem. · 1970 · 2 · 44510.1016/0022-4596(70)90104-0 ↗
6. Rausch · Microelectron. J. · 1993 · 24 · 42110.1016/0026-2692(93)90048-J ↗
7. Saito · IEDM Tech. Dig. · 1986 · 680