Investigation of the precursors of a-Si:H films produced by decomposition of silane on hot tungsten surfaces
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Transition Metal Oxide Nanomaterials
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References (7)
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5. Hydrogen incorporation in amorphous silicon and processes of its release
6. Sault · Surf. Sci. · 1990 · 235 · 2810.1016/0039-6028(90)90103-F ↗
7. Hashimoto · Surf. Sci. · 1984 · 137 · L7510.1016/0039-6028(84)90671-X ↗