Crystalline-amorphous contrast formation in thermally crystallized SiC
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Diamond and Carbon-based Materials Research · Silicon Carbide Semiconductor Technologies
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References (5)
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1. e.g. Landolt-Börnstein, New Series III/17a (1982); III/17c (1984); III/22a (1987); Springer Verlag (Berlin, Heidelberg, New York)
2. Kalbitzer · Appl. Phys. · 1987 · A44 · 15310.1007/BF00626416 ↗
3. Cody · 1984 · Vol. 21B
4. Böhringer · Nucl. Instr. & Meth. · 1988 · B30 · 28910.1016/0168-583X(88)90013-4 ↗
5. Derst · Appl. Phys. Lett. · 1989 · 54 · 172210.1063/1.101271 ↗