Deposition of phosphorus doped microcrystalline silicon below 70 °C at 70 MHz
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Abstract
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Research context
OpenAlex topics: Silicon Nanostructures and Photoluminescence · Thin-Film Transistor Technologies · Semiconductor materials and devices
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References (6)
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1. Prasad · 1989 · 164 · 27
2. Prasad · 1991 · 219
3. Finger · 1991 · 219
4. Hamasaki · Jpn. J. Appl. Phys. · 1981 · 20 · L8410.1143/JJAP.20.L84 ↗
5. Stutzmann · 1989 · 164 · 189
6. Pierz · Phil. Mag.B · 1991 · 61 · 12310.1080/01418639108224434 ↗