Defect study of phosphorous doped a-Si:H thin films using cathodoluminescence, IR and Raman spectroscopy
Source abstract
Abstract
The phosphorous (P) doping induced defects and deviation in microstructural properties of a-Si:H films have been investigated by Infrared (IR), Raman and Cathodoluminescence (CL) spectroscopy. The analysis of local vibration mode of IR and Raman spectra points out the evolution of defects and cluster structure with a P-doping in a-Si:H films. Undoped a-Si: H films show no CL spectra while it emerges in P-doped films. Intensification in CL spectra with P-doping intimates that the crystallites and defects in films are the origin of CL spectra. CL peaks are emanated from intrinsic structural defects, interstitial cations and two-fold coordinated silicon in films. Peaks at 784 nm and 945 nm in CL spectra are originated from Si micro-crystals.
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (45)
Show source-provided references
1. Crystalline and thin-film silicon solar cells: state of the art and future potential10.1016/S0038-092X(03)00187-7 ↗
2. A review and analysis of technologies applied in PV modules
3. Nanocomposites with three dimensional architecture and impact on photovoltaic Effect10.1021/acs.nanolett.0c03654 ↗
4. Control of Layering in Aurivillius Phase Nanocomposite Thin Films and Influence on Ferromagnetism and Optical Absorption10.1021/acsaelm.2c00160 ↗
5. Development of Textured Electrode, Index Matching Layer and Nanostructured Materials for Light Trapping inside Photovoltaic10.1016/j.matpr.2018.11.083 ↗
6. Present and future applications of amorphous silicon and its alloys10.1016/0022-3093(89)90346-3 ↗
7. Growth morphology and defects in plasma-deposited a-Si:H films10.1016/0022-3093(80)90589-X ↗
8. Formation of nanocrystallites in amorphous silicon thin films10.1016/0022-0248(94)90295-X ↗
9. Vacancies and voids in hydrogenated amorphous silicon10.1063/1.1559657 ↗
10. Defect study of SnO2 nanostructures by cathodoluminescence analysis: Application to nanowires10.1016/j.snb.2006.10.014 ↗
11. Cathodoluminescence scanning electron-microscopy of semiconductors10.1063/1.336491 ↗
12. Visible Cathode Luminescence of Oxidized Dy-Doped Si Films10.1143/JJAP.46.5196 ↗
13. Investigation of emitting centers in SiO2 codoped with silicon nanoclusters and Er3+ ions by cathodoluminescence technique10.1063/1.3517091 ↗
14. Cathodoluminescence of Ge+, Si+, and O+ implanted SiO2 layers and the role of mobile oxygen in defect transformations10.1016/S0022-3093(02)00952-3 ↗
15. Cathodoluminescence study of SiO210.1063/1.327846 ↗
16. Cathodoluminescence Depth Profiling in SiO2:Ge Layers10.1007/s006040200033 ↗
17. Effect of ZnO:Al Thickness on the Open Circuit Voltage of Organic/a-Si:H Based Hybrid Solar Cells
18. Application of SixNy:Hz (SiN) as index matching layer in a-Si:H thin film solar cells
19. Defect states in doped and compensated a-Si: H10.1103/PhysRevB.24.969 ↗
20. Phosphorus- and boron-doped hydrogenated amorphous silicon films prepared using vaporized liquid cyclopentasilane10.1016/j.tsf.2015.05.040 ↗
21. Doping gas effects on plasma enhanced chemical vapor deposition on heavily phosphorus-doped n+ silicon film10.1063/1.120146 ↗
22. Si-H clusters, defects, and hydrogenated silicon10.1103/PhysRevB.64.125203 ↗
23. Donor-hydrogen complexes in passivated silicon10.1103/PhysRevB.37.2770 ↗
24. Adsorption and Dissociation of Phosphine on Si(001)10.1021/jp952452h ↗
25. The interaction of atomic hydrogen with very thin amorphous hydrogenated silicon films analyzed using in situ real time infrared spectroscopy: Reaction rates and the formation of hydrogen platelets10.1063/1.368082 ↗
26. Characterization of Defects and Stress in Polycrystalline Silicon Thin Films on Glass Substrates by Raman Microscopy10.1155/2011/632139 ↗
27. Beyer, W. Hydrogen phenomena in hydrogenated silicon. 1999 Semiconductors and Semimetals10.1016/S0080-8784(08)62707-6 ↗
28. N H Nickel, N. H., Ed. San Diego, CA: Academic, 1999, 61, 165.
29. Luminescence decay in hydrogenated amorphous silicon and silicon nanostructures10.1016/j.jnoncrysol.2012.01.012 ↗
30. Competition between green self-trapped-exciton and red non-bridging-oxygen emissions in SiO2 under interband excitation10.1038/s42005-018-0069-5 ↗
31. Time-resolved photoluminescence study of silica nanoparticles as compared to bulk type-III fused silica10.1103/PhysRevB.66.035404 ↗
32. Cathodoluminescence microcharacterization of point defects in α-quartz10.1180/minmag.2009.073.4.585 ↗
33. Cathodoluminescence of Diamond-Like and Hydrogenated Amorphous Silicon Carbide Materials10.1557/PROC-192-181 ↗
34. The origin of the intrinsic 1.9 eV luminescence band in glassy SiO210.1016/0022-3093(94)90684-X ↗
35. Blue emission in porous silicon: Oxygen-related photoluminescence10.1103/PhysRevB.49.7821 ↗
36. Photoluminescence mechanism for blue-light-emitting porous silicon10.1103/PhysRevB.55.12876 ↗
37. Cathodoluminescence study of silicon oxide-silicon interface10.1134/S1063782607040203 ↗
38. Cathodoluminescence and photoluminescence of amorphous silicon oxynitride10.1016/S0026-2714(99)00036-0 ↗
39. Point-Defect Populations As Induced by Cation/Anion Substitution in β-Si3N4 Lattice. A Cathodoluminescence Study10.1021/jp509995c ↗
40. The origin of photoluminescence from thin films of silicon-rich silica10.1063/1.362605 ↗
41. Donor-related cathodoluminescence in phosphorus-doped CVD diamond10.1016/j.diamond.2003.10.004 ↗
42. Cathodoluminescence from nanocrystalline silicon films and porous silicon10.1007/s003390050897 ↗
43. Luminescence from plasma deposited silicon films10.1063/1.364247 ↗
44. Characterization of Electron Cyclotron Resonance Plasma-Deposited Hydrogenated Amorphous Silicon and Related Alloy Films10.1557/PROC-219-679 ↗
45. Preparation of boron and phosphorus-doped SiC:H films using electron cyclotron resonance chemical vapor deposition: Some effects of microwave power10.1557/JMR.1999.0007 ↗