Photolithographic performance of a-As2S3 resists under synchrotron X-ray irradiation
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Phase-change materials and chalcogenides · Advanced Memory and Neural Computing · Chalcogenide Semiconductor Thin Films
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (4)
Show source-provided references
1. Mednikarov · Solid State Technology · 1984 · 27 · 17710.1016/0038-1101(84)90109-6 ↗
2. Rush · Report DL/SCI/P4O5E of the Daresbury Laboratory · 1983
3. Haller · J. Electrochem. Soc. · 1975 · 126 · 15410.1149/1.2128974 ↗
4. Korsakov · Avtometria · 1975 · 6 · 97