ULE® Glass for EUVL applications, a fictive temperature correlation

Abstract Infrared peak positions were correlated to the fictive temperatures (T f ) of titania doped silica glasses as a function of titania content for glasses with between 7 and 8 wt.% TiO 2 . To establish fictive temperature, both the infrared peak position and the percent titania need to be known. The correlation was established by taking 1 mm thick slices of silica doped with 7.0, 7.3 and 7.7 wt.% TiO 2 , holding them isothermally until the structure comes into equilibrium with the hold temperature and then quenching the samples in room temperature water. Five hold temperatures between 900 and 1100 °C were used. A correlation was obtained with R 2 values of > 0.98 for each TiO 2 concentration.