Structure, mechanical properties and imprint-ability of Pd–Cu–Ni–P glassy alloy thin film prepared by a pulsed-laser deposition method

Abstract With the aim of preparing nano-hole array for bit patterned media of ultra high density data storage, fabrication and imprint-ability of Pd–Cu–Ni–P glassy alloy thin film was investigated. By using a pulsed-laser deposition method, the Pd-based glassy alloy thin film was successfully fabricated. The thermal characteristics of the obtained film were very close to those of the melt-spun glassy alloy ribbon. The obtained film has very smooth surface and high hardness, which are suitable for nano-imprint processing. Nano-imprint-ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The periodic dot pattern of the mold was precisely transcribed. These results suggest that the Pd–Cu–Ni–P glassy alloy thin films are potential nano-imprinting materials for fabricating bit patterned media.