journal article·2014-10

X-ray absorption spectroscopy of Cu-doped WO3 films for use in electrochemical metallization cell memory

A. Kuzmin, A. Anspoks, A. Kalinko, J. Timoshenko, R. Kalendarev

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Abstract

Abstract We have performed the first synchrotron radiation X-ray absorption spectroscopy (EXAFS/XANES) study of the local atomic and electronic structure around Cu and W ions in WO 3 /Cu/WO 3 /Si and WO 3 /Cu/Si multilayered structures, aimed for the application in the electrochemical metallization cell memory. The influence of low-temperature annealing at 135 °C has been investigated in details, and a structural model of Cu-doped WO 3 films is proposed.
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Research context

OpenAlex topics: Advanced Memory and Neural Computing · Transition Metal Oxide Nanomaterials · Semiconductor materials and devices

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