LIF and OES detection of radical species in SiF4 + H2 plasmas
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Abstract
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OpenAlex topics: Thin-Film Transistor Technologies · Ion-surface interactions and analysis · Silicon Nanostructures and Photoluminescence
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References (11)
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1. S.R. Ovshinsky and A. Madan, U.S. Patent 4,226,898.
2. Kampas · Solar Cells · 1980 · 2 · 38510.1016/0379-6787(80)90014-9 ↗
3. Scott · Appl. Phys. Lett. · 1981 · 39 · 7310.1063/1.92521 ↗
4. Matsuda · Thin Solid Films · 1982 · 92 · 17110.1016/0040-6090(82)90200-0 ↗
5. Kampas · J. Appl. Phys. · 1981 · 52 · 128510.1063/1.329752 ↗
6. Robertson · Appl. Phys. Lett. · 1983 · 43 · 54410.1063/1.94413 ↗
7. J.P.M. Schmitt, P. Gressier, M. Krishnan, G. de Rosny and J. Perrin, Chem. Phys. (in press).
8. Madan · Philos. Mag. B · 1979 · 40 · 25910.1080/01418637908227166 ↗
9. Lee · J. Non-Cryst. Solids · 1983 · 59 & 60 · 67110.1016/0022-3093(83)90260-0 ↗
10. Johns · 1958 · 71 · 476
11. Lee · Chem. Phys. Lett. · 1983 · 99 · 39410.1016/0009-2614(83)80161-4 ↗