Relationship between film quality and deposition rate for a-Si:H by ECR plasma CVD
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (8)
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5. Zhang · 1992 · 66
6. Unpublished
7. Matsuda · Surf. Sci. · 1990 · 227 · 5010.1016/0039-6028(90)90390-T ↗
8. Nakayama · J. Non-Cryst. Solids · 1991 · 137&138 · 66910.1016/S0022-3093(05)80209-1 ↗