Pass - a chalcogenide-based lithography scheme for I.C. fabrication
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Abstract
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Research context
OpenAlex topics: Photonic and Optical Devices · Optical Coatings and Gratings · Advancements in Photolithography Techniques
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References (6)
Show source-provided references
1. Kozicki · 1989 · 251
2. R.E. Belford, E. Hajto and A.E. Owen. To be published in Thin Solid Films.
3. Tai · J. Vac. Sci. Technol. · 1980 · 17 · 116910.1116/1.570634 ↗
4. Mizushima · 1981 · 277
5. Owen · Phil. Mag. B · 1985 · 52 · 34710.1080/13642818508240606 ↗
6. Bernstein · J. Vac. Sci. Technol. B · 1988 · 6 · 229810.1116/1.584074 ↗