The grain size in microcrystalline silicon: correlation between atomic force microscopy, UV reflectometry, ellipsometry, and X-ray diffractometry

journal article·1996-05

E. Bardet, J.E. Bourée, M. Cuniot, J. Dixmier, P. Elkaim, J. Le Duigou, A.R. Middya, J. Perrin

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Abstract

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Force Microscopy Techniques and Applications

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