Some properties of TiO2-layers prepared by mid-frequency and dc reactive magnetron sputtering
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OpenAlex topics: Ion-surface interactions and analysis · ZnO doping and properties · Metal and Thin Film Mechanics
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References (9)
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7. Szczyrbowski · J. Phys. · 1979 · D12 · 1737
8. Thornton · J. Vac. Sci. Technol. · 1986 · A4 · 305910.1116/1.573628 ↗
9. B. Szyszka, unpublished results, Fraunhofer-Gesellschaft, Institut für Schicht- und Oberflächentechnik (IST), Braunschweig, Germany.