Control of crystallinity of microcrystalline silicon film grown on insulating glass substrates

journal article·1998-05

Jiang-Huai Zhou, Kazuyuki Ikuta, Tetsuji Yasuda, Takahide Umeda, Satoshi Yamasaki, Kazunobu Tanaka

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Abstract

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies

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1. Usui · J. Non-Cryst. Solids · 1979 · 34 · 110.1016/0022-3093(79)90002-4 ↗

2. Ishihara · Jpn. J. Appl. Phys. · 1994 · 33 · 5110.1143/JJAP.33.51 ↗

3. Layadi · Phys. Rev. B · 1995 · 52 · 513610.1103/PhysRevB.52.5136 ↗

4. Kondo · J. Appl. Phys. · 1996 · 80 · 606110.1063/1.363565 ↗

5. Tsai · Mater. Res. Soc. Symp. Proc. · 1990 · 192 · 47510.1557/PROC-192-475 ↗

6. Matsuda · Jpn. J. Appl. Phys. · 1983 · 22 · L3410.1143/JJAP.22.L34 ↗

7. J-H. Zhou, K. Ikuta, T. Yasuda, T. Umeda, S. Yamasaki, and K. Tanaka, Appl. Phys. Lett., accepted.

8. Miyamoto · Mater. Res. Soc. Symp. Proc. · 1997 · 452 · 99510.1557/PROC-452-995 ↗

9. Nguyen · Appl. Phys. Lett. · 1994 · 65 · 333510.1063/1.113024 ↗