RF magnetron sputtering of polymers
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Abstract
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Research context
OpenAlex topics: Plasma Diagnostics and Applications · Electrohydrodynamics and Fluid Dynamics · Metal and Thin Film Mechanics
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References (16)
Show source-provided references
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10. Musil · 1995 · 179
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12. Ryan · J. Phys. Chem. · 1995 · 99 · 706010.1021/j100018a044 ↗
13. 1974
14. Dechant · 1972
15. Hishmeh · J. Vac. Sci. Technol. · 1996 · A14 · 133010.1116/1.579950 ↗
16. V. Stundžia, H. Biederman, unpublished results.