journal article·1995-07

Atomic hydrogen-induced degradation of thin SiO2 gate oxides

E. Cartier, D.A. Buchanan, J.H. Stathis, D.J. DiMaria

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OpenAlex topics: Semiconductor materials and devices · Advancements in Semiconductor Devices and Circuit Design · Advanced Memory and Neural Computing

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References (16)

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14. Stathis · Phys. Rev. Lett. · 1994 · 72 · 274510.1103/PhysRevLett.72.2745 ↗
15. DiMaria · J. Appl. Phys. · 1993 · 73 · 336710.1063/1.352936 ↗
16. Cartier · Appl. Phys. Lett. · 1994 · 64 · 90110.1063/1.110990 ↗