New diagnostic aspects of high rate a-Si:H deposition in a VHF plasma
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Abstract
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Research context
OpenAlex topics: Plasma Diagnostics and Applications · Thin-Film Transistor Technologies · Metal and Thin Film Mechanics
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References (8)
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8. Wang · Appl. Phys. Lett. · 1995 · 66 · 232910.1063/1.113972 ↗